A Three-Axis Angle Sensor with a Linear Encoder Scale Reflector
A Three-Axis Angle Sensor with a Linear Encoder Scale Reflector
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DOI：
10.4028/www.scientific.net/amm.870.141
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发表时间：
2017-09
期刊：
影响因子：
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通讯作者：
Y. Shimizu;T. Maruyama;S. Ito;W. Gao
中科院分区：
文献类型：
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作者：
Y. Shimizu;T. Maruyama;S. Ito;W. Gao
本文提出了一种光学三轴角度传感器的设计研究，用于测量长行程精密线性平台的角度误差运动。三轴角度传感器基于激光自准直方法，利用安装在测量目标上作为反射器的衍射光栅发出的零级和一级衍射光束，可以同时检测绕 XYZ 轴的角运动。在本文中，光学传感器头的设计方式是三轴角度传感器与线性编码器的光学传感器头共享一个衍射光栅，线性编码器已经安装在平台系统中。三轴角度传感器的光学传感头设计成小于50mm×30mm×30mm的尺寸，使得传感头能够与线性编码器兼容。报告了为传感器头设计的光学配置的详细信息以及一些实验结果。
This paper presents a design study of an optical three-axis angle sensor for measurement of angular error motions of long-stroke precision linear stages. The three-axis angle sensor, which is based on a laser autocollimation method, can detect angular motions about the XYZ-axes simultaneously by using zeroth-and first-order diffraction beams from a diffraction grating mounted on a measuring target as a reflector. In this paper, an optical sensor head is designed in such a way that the three-axis angle sensor shares a diffraction grating with an optical sensor head of a linear encoder, which is already installed in a stage system. The optical sensor head of the three-axis angle sensor is designed in a size of smaller than 50 mm × 30 mm × 30 mm so that the sensor head can be compatible with the linear encoder. Details of the optical configuration designed for the sensor head, and some results of experiments are reported.