Design and Fabrication of a Metallic Micro-Heat Pipe Based on High-Aspect-Ratio Microchannels
Design and Fabrication of a Metallic Micro-Heat Pipe Based on High-Aspect-Ratio Microchannels
复制标题
基于高深宽比微通道的金属微热管的设计与制造
DOI：
10.1080/01457630701328585
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发表时间：
2007
期刊：
影响因子：
--
通讯作者：
S. Jeong
中科院分区：
文献类型：
--
作者：
K. Oh;M. K. Lee;S. Jeong
微热管的冷却能力主要取决于毛细毛细结构中所产生的毛细压力的大小。对于微通道芯，对于更窄和更深的通道可实现更高的毛细管压力。在本研究中，我们制作了一种采用高深宽比微通道吸液芯的金属微热管。高深宽比微通道的微加工是使用激光诱导湿法蚀刻技术完成的，其中聚焦的激光束沿着沿着期望的通道图案照射放置在液体蚀刻剂中的工件。由于激光诱导湿法刻蚀的直写特性，不需要掩模，制作工艺相对简单。深的微通道的纵横比接近10，可以很容易地制造，对工件的热损伤很小。详细介绍了在0.5mm厚不锈钢箔上制备高深宽比微通道的激光诱导湿法刻蚀工艺。微通道的形状和尺寸的变化相对于工艺变量，如激光功率，扫描速度，扫描次数，和蚀刻剂浓度，仔细检查。此外，基于高深宽比的微通道的平板微热管的制造被证明。
The cooling capacity of a micro-heat pipe is mainly governed by the magnitude of capillary pressure induced in the wick structure. For microchannel wicks, a higher capillary pressure is achievable for narrower and deeper channels. In this study, a metallic micro-heat pipe adopting high-aspect-ratio microchannel wicks is fabricated. The micromachining of high-aspect-ratio microchannels is done using the laser-induced wet etching technique in which a focused laser beam irradiates the workpiece placed in a liquid etchant along a desired channel pattern. Because of the direct writing characteristic of the laser-induced wet etching method, no mask is necessary, and the fabrication procedure is relatively simple. Deep microchannels of an aspect ratio close to 10 can be readily fabricated with little heat damage to the workpiece. The laser-induced wet etching process for the fabrication of high-aspect-ratio microchannels in 0.5 mm thick stainless steel foil is presented in detail. The shape and size variations of microchannels with respect to the process variables, such as laser power, scanning speed, number of scans, and etchant concentration, are closely examined. Also, the fabrication of a flat micro-heat pipe based on the high-aspect-ratio microchannels is demonstrated.