Development of an Educational Resource of Si Semiconductor Devices Fabrication by using Simplified Process for Education in Semiconductor Engineering
Development of an Educational Resource of Si Semiconductor Devices Fabrication by using Simplified Process for Education in Semiconductor Engineering
复制标题
利用半导体工程教育的简化流程开发硅半导体器件制造的教育资源
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
and A. Wakahara
中科院分区：
文献类型：
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作者：
T. Tsuji;S. Nagaoka;M. Ohtani;and A. Wakahara
