Spray Pyrolysis Preparation and Humidity Sensing Characteristics of Spinel Zinc Stannate Thin Films
Spray Pyrolysis Preparation and Humidity Sensing Characteristics of Spinel Zinc Stannate Thin Films
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DOI：
10.1006/jssc.1996.7174
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发表时间：
1997-02
影响因子：
5.4
通讯作者：
I. Stambolova;K. Konstantinov;D. Kovacheva;P. Peshev;T. Donchev
中科院分区：
文献类型：
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作者：
I. Stambolova;K. Konstantinov;D. Kovacheva;P. Peshev;T. Donchev
摘要采用喷雾热解方法在氧化铝衬底上成功制备了多晶尖晶石结构的锌锡氧化物薄膜。结果表明，两种阳离子在薄膜中的比例与初始溶液中的比例有很大的不同。通过优化溶液组成、沉积和热处理参数，可以获得与基片结合良好的均匀单相薄膜。在室温下，薄膜的电阻强烈依赖于湿度，响应和恢复时间很短(1-2分钟)。当薄膜中存在二元氧化物(氧化锌或二氧化锡)杂质时，湿敏特性变差。
Abstract Polycrystalline spinel Zn2SnO4films were successfully deposited on alumina substrates by spray pyrolysis. It was found that the ratio of the two cations in the films obtained differs considerably from the ratio in the initial solutions. By optimizing the solution compositions and the deposition and heat-treatment parameters, it was possible to obtain homogeneous single phase films with good adhesion to the substrate. At room temperaturethe electrical resistance of the films was strongly dependent on humidity, the response and recovery times being very short (1–2 min). The humidity sensing characteristics deteriorated in the presence of a binary oxide (ZnO or SnO2) impurity in the film.