S.Kumagai,M.Sasaki,M.Koyanagi,K.Hane: "Dominance of Cl_2^- or Cl^+ Ions in Time-Modulated Inductively Coupled Cl_2 Plasma Investigated with Laser-Induced Fluorescence and Probe Measurement "Japan Journal of Applied Phusics. 39. 6980-6984 (2000)
S.Kumagai,M.Sasaki,M.Koyanagi,K.Hane: "Dominance of Cl_2^- or Cl^+ Ions in Time-Modulated Inductively Coupled Cl_2 Plasma Investigated with Laser-Induced Fluorescence and Probe Measurement "Japan Journal of Applied Phusics. 39. 6980-6984 (2000)
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S.Kumagai、M.Sasaki、M.Koyanagi、K.Hane:“用激光诱导荧光和探针测量研究时间调制感应耦合 Cl_2 等离子体中 Cl_2^- 或 Cl^ 离子的优势”日本应用物理学杂志。
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