Fabrication of 10 nm enclosed nanofluidic channels
Fabrication of 10 nm enclosed nanofluidic channels
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DOI：
10.1063/1.1489102
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发表时间：
2002-07-01
影响因子：
4
通讯作者：
Chou, SY
中科院分区：
文献类型：
--
作者：
Cao, H;Yu, ZN;Chou, SY
我们使用纳米压印光刻法在大面积（100毫米晶片）的纳米级结构的均匀阵列。通过基于非均匀沉积的技术进一步缩小和密封纳米流体通道。由此产生的密封通道具有小至10 nm × 50 nm的横截面，这对于将生物分子限制在超小空间中非常重要。这些技术可以是有价值的制造工具，纳米机电系统和微/纳米全分析系统。(C)2002年美国物理学会。
We made uniform arrays of nanometer scale structures using nanoimprint lithography over large areas (100 mm wafers). The nanofluidic channels were further narrowed and sealed by techniques that are based on nonuniform deposition. The resulting sealed channels have a cross section as small as 10 nm by 50 nm, of great importance for confining biological molecules into ultrasmall spaces. These techniques can be valuable fabrication tools for Nanoelectromechanical Systems and Micro/Nano Total Analysis Systems. (C) 2002 American Institute of Physics.