Oxidation Mechanism of Silicon Surface. Growth Kinetics of Very Thin Oxide Layers on Si(001) Surface Monitored in Real-time by Auger Electron Spectroscopy Combined with Reflection High Energy Electron Diffraction.
Oxidation Mechanism of Silicon Surface. Growth Kinetics of Very Thin Oxide Layers on Si(001) Surface Monitored in Real-time by Auger Electron Spectroscopy Combined with Reflection High Energy Electron Diffraction.
复制标题
硅表面的氧化机理。
DOI:
10.1380/jsssj.23.536
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发表时间:
2002
期刊:
影响因子:
--
通讯作者:
Y. Takakuwa
中科院分区:
文献类型:
--
作者:
Y. Takakuwa
DOI:
--
发表时间:
2008
期刊:
影响因子:
--
作者:
冷清水裕子;泉水一紘;Jacek Osiecki;千葉朋;名取晃子;粕谷厚生;須藤彰三
通讯作者:
須藤彰三