Oxidation Mechanism of Silicon Surface. Growth Kinetics of Very Thin Oxide Layers on Si(001) Surface Monitored in Real-time by Auger Electron Spectroscopy Combined with Reflection High Energy Electron Diffraction.

Oxidation Mechanism of Silicon Surface. Growth Kinetics of Very Thin Oxide Layers on Si(001) Surface Monitored in Real-time by Auger Electron Spectroscopy Combined with Reflection High Energy Electron Diffraction.
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硅表面的氧化机理。

DOI:
10.1380/jsssj.23.536
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发表时间:
2002
期刊:
Hyomen Kagaku
影响因子:
--
通讯作者:
Y. Takakuwa
Y. Takakuwa
中科院分区:
--
文献类型:
--
作者:
Y. Takakuwa

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发表时间: 2008
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