STICKING AND RECOMBINATION OF THE SIH3 RADICAL ON HYDROGENATED AMORPHOUS-SILICON - THE CATALYTIC EFFECT OF DIBORANE
STICKING AND RECOMBINATION OF THE SIH3 RADICAL ON HYDROGENATED AMORPHOUS-SILICON - THE CATALYTIC EFFECT OF DIBORANE
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DOI:
10.1016/0039-6028(89)90106-4
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发表时间:
1989-03-01
期刊:
影响因子:
1.9
通讯作者:
MATSUDA, A
中科院分区:
文献类型:
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作者:
PERRIN, J;TAKEDA, Y;MATSUDA, A