Chromatic Confocal Microscopy
Chromatic Confocal Microscopy
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DOI：
10.1007/978-3-642-12012-1_5
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发表时间：
2011
期刊：
影响因子：
1.7
通讯作者：
F. Blateyron
中科院分区：
文献类型：
--
作者：
F. Blateyron
彩色共焦探头是围绕共焦同轴设置构建的单点光学传感器，其使用色散和解码来获得表面距离。这种传感器通常安装在表面纹理测量仪、圆度仪或坐标测量机的扫描台上。彩色共焦探头可以在透明材料上进行测量，并通过透明材料检测材料之间的多个界面，从而计算厚度。彩色共焦测头具有与触针式测头相近的测量特性，常用作触针式轮廓仪的非接触替代品。
Chromatic confocal probes are single point optical sensors built around a confocal coaxial setting that use chromatic dispersion and decoding to obtain the surface distance. Such sensors are usually installed on scanning stages of surface texture measuring instruments, roundness instruments or coordinate measuring machines. Chromatic confocal probes can measure on, and through, transparent material, detect several interfaces between materials and, therefore, calculate thickness. The metrological characteristics of chromatic confocal probes are close to those of stylus probes and they are often used as a non-contact substitute on stylus profilometers.