Instantaneous measurement Fizeau interferometer with high spatial resolution
Instantaneous measurement Fizeau interferometer with high spatial resolution
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DOI：
10.1117/12.894676
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发表时间：
2011-09
期刊：
影响因子：
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通讯作者：
Daniel M. Sykora;P. D. de Groot
中科院分区：
文献类型：
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作者：
Daniel M. Sykora;P. D. de Groot
现代精密光学制造对仪器设计提出了很高的要求，既要灵活应对挑战性环境，又要具有高横向分辨率，以测量表面形状和中空间频率波度。在这里，我们报告一个菲佐型干涉仪优化的光效率，单帧载波条纹采集瞬时计量在高横向分辨率。全相干光学器件和1200 x 1200像素摄像头提供高斜率接受度和仪器传递函数（ITF），在250个周期/孔径下，所有变焦设置均高于50%，如蚀刻相位阶跃和定制周期性伪影所示。该仪器还在同一平台上使用可选的时间相移干涉测量法提供500周期/孔径的ITF。
Modern precision optical manufacturing places high demands on instrument design, both for flexible response to challenging environments and high lateral resolution for measuring both surface form and mid spatial frequency waviness. Here we report on a Fizeau-type interferometer optimized for light-efficient, single-frame carrier fringe acquisition for instantaneous metrology at high lateral resolution. Fully coherent optics and a 1200 x 1200 pixel camera provide high slope acceptance and an instrument transfer function (ITF) above 50% at 250 cycles/aperture for all zoom settings, as demonstrated for an etched phase step and custom periodic artifact. The instrument further provides an ITF of 500 cycles/aperture using optional temporal phase shifting interferometry on the same platform.