Study on Thermal Influence of Grinding Process on LiTaO3
Study on Thermal Influence of Grinding Process on LiTaO3
复制标题
研磨过程对LiTaO3热影响的研究
DOI：
10.4028/www.scientific.net/amr.797.252
复制
发表时间：
2013
期刊：
影响因子：
--
通讯作者：
J. Yuan
中科院分区：
文献类型：
--
作者：
W. Hang;Li Bo Zhou;J. Shimizu;J. Yuan
作为一种典型的多功能单晶材料，钽酸锂（LiTaO3或LT）表现出优异的电光、热释电和压电性能，现已广泛应用于许多领域，特别是在电信领域。然而，该过程中最关键的问题是其热释电效应和压电效应，这可能导致磨削过程中裂纹的萌生。由于LT具有丰富的塑性，因此需要较大的比能量来去除材料。由于大部分加工能量最终转化为热量，LT在磨削过程中温度急剧升高，因此热冲击风险很高。为了阐明热对LiTaO3磨削过程的影响，本研究研究了冷却液温度、金刚石砂轮几何形状和基体材料的影响。实验结果表明，磨削扭矩（或力）的增加速率和表面粗糙度是LT晶片磨削过程中裂纹萌生的两个主要因素。通过 DOE（实验设计）分析，冷却剂温度和轮类型是影响增长率和晶圆表面粗糙度的主要因素。
As a typical multi-functional single crystal material, Lithium tantalate (LiTaO3 or LT) exhibits its excellent electro-optical, pyroelectric and piezoelectric properties, and has now been widely applied into many applications, especially in the telecommunication field. However, the most critical issue in the process is its pyroelectric effect and piezoelectric effect which potentially leads to crack initiation during grinding. Because it is rich in plasticity, LT demands larger specific energy for material removal. As the most machining energy is eventually converted into heat, LT undergoes a rapid rise in temperature during the grinding process, thus highly risks in thermal shock. In order to clarify the thermal influence on the grinding process of LiTaO3, the effects of coolant temperature, diamond grinding wheel geometry and material of substrate are investigated in this research. The experimental results show that the increasing rate of grinding torque (or force) and surface roughness are two major factors dominating the crack initiation during grinding of LT wafers. Via a DOE (design of experiment) analysis, coolant temperature and wheel type stand out as the main factors influencing on the increasing rate and wafer surface roughness.