Fabrication and Optimization of High Frequency ZnO Transducers for Both Longitudinal and Shear Emission: Application of Viscosity Measurement using Ultrasound
Fabrication and Optimization of High Frequency ZnO Transducers for Both Longitudinal and Shear Emission: Application of Viscosity Measurement using Ultrasound
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用于纵向和剪切发射的高频 ZnO 传感器的制造和优化：超声波粘度测量的应用
DOI：
10.25046/aj0506173
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发表时间：
2020
期刊：
影响因子：
--
通讯作者：
B. Nongaillard
中科院分区：
文献类型：
--
作者：
H. Dahmani;I. Zaaroura;A. Salhab;P. Campistron;J. Carlier;M. Toubal;S. Harmand;V. Thomy;M. Neyens;B. Nongaillard
A R T I C L E I N F O A B S T R A C T文章历史：接收：2020年8月31日接受：2020年12月01日在线：2020年12月21日本文涵盖了集成在硅衬底上的高频（~ 1 GHz）ZnO压电换能器的研究，该换能器能够产生压缩和剪切声波。首先，为了促进纵向模式，实现换能器在该高频范围内的电匹配。其次，为了促进剪切波，应用新的沉积条件，得到倾斜c轴的薄氧化锌膜。RF微探针用于验证传感器设计并进行粘度测量。因此，测量水滴的剪切和体积粘度。
A R T I C L E I N F O A B S T R A C T Article history: Received: 31 August, 2020 Accepted: 01 December, 2020 Online: 21 December, 2020 This paper covers the study of high-frequency (~ 1 GHz) ZnO piezoelectric transducer integrated on a silicon substrate able to generate both compressional and shear acoustic waves. First, to promote the longitudinal mode, an electrical matching of the transducer in this high-frequency range is effectuated. Second, to promote shear waves, new deposition conditions were applied, giving thin zinc oxide films of inclined c-axis. The RF microprobe was used to validate the transducer design and to conduct the viscosity measurements. Thus, the shear and the volume viscosity of a water droplet were measured.