An autocollimator with a mid-infrared laser for angular measurement of rough surfaces
An autocollimator with a mid-infrared laser for angular measurement of rough surfaces
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DOI：
10.1016/j.precisioneng.2020.09.022
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发表时间：
2021
影响因子：
3.6
通讯作者：
H. Matsukuma;Yun Asumi;M. Nagaoka;Y. Shimizu;W. Gao
中科院分区：
文献类型：
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作者：
H. Matsukuma;Yun Asumi;M. Nagaoka;Y. Shimizu;W. Gao
在这项研究中，我们提出了一个自准直仪的角度测量粗糙表面。采用波长为2.8 μm的中红外激光作为光源，因为它在粗糙表面上具有高镜面反射率。虽然使用可见激光的传统自准直仪具有高分辨率的角度测量，但它只能用于测量镜面，因为来自粗糙表面的反射光的强度分布由于漫反射的影响而显著改变。通过反射模型的模拟，验证了自准直仪中红外激光器用于粗糙表面（亚微米级）角度测量的适用性。为此，研制了一种用于自准直仪的连续模氟化物玻璃光纤中红外激光器。此外，设计并制作了一套自准直装置，用于检测中红外激光在目标表面反射后的角位移。通过实验验证了所研制的自准直仪用于粗糙表面角度测量的能力。
In this study, we proposed an autocollimator for the angular measurement of rough surfaces. A mid-infrared laser having a wavelength of 2.8 μm was employed as the light source because it possesses high specular reflectivity on rough surfaces. Although a conventional autocollimator using a visible laser has a high resolution of angular measurement, it can only be used to measure mirror surfaces because the intensity distribution of the reflected light from a rough surface changes significantly due to the influence of diffused reflection. The suitability of a mid-infrared laser in an autocollimator for the angular measurement of rough surfaces (sub-micrometer level) was verified through simulations using reflection models. Therefore, a continuous-wave mode fluoride glass fiber based mid-infrared laser was developed for the autocollimator. Furthermore, an autocollimation unit was designed and constructed for detecting the angular displacement of mid-infrared laser light reflected from a target surface. The capability of the developed autocollimator for the angular measurement of rough surfaces was demonstrated through experiments.