The Ultrasmoothness of Diamond-like Carbon Surfaces
The Ultrasmoothness of Diamond-like Carbon Surfaces
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DOI：
10.1126/science.1114577
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发表时间：
2005-09
期刊：
影响因子：
56.9
通讯作者：
M. Moseler;P. Gumbsch;C. Casiraghi;A. Ferrari;J. Robertson
中科院分区：
文献类型：
--
作者：
M. Moseler;P. Gumbsch;C. Casiraghi;A. Ferrari;J. Robertson
类金刚石碳涂层的超光滑性解释了原子/连续多尺度模型。在原子尺度上，碳离子的碰撞在生长膜的顶层中诱导下坡电流。在连续体尺度上，这些水流通过侵蚀丘陵进入邻近的洼地，使最初粗糙的基底迅速变平滑。预测的表面演变与原子力显微镜测量结果非常一致。这种机制是通用的，如非晶硅的类似模拟所示。它解释了最近报道的平滑的多层膜和非晶过渡金属氧化物薄膜，并强调了离子沉积，抛光和纳米图案化的影响引起的下坡电流的一般重要性。
The ultrasmoothness of diamond-like carbon coatings is explained by an atomistic/continuum multiscale model. At the atomic scale, carbon ion impacts induce downhill currents in the top layer of a growing film. At the continuum scale, these currents cause a rapid smoothing of initially rough substrates by erosion of hills into neighboring hollows. The predicted surface evolution is in excellent agreement with atomic force microscopy measurements. This mechanism is general, as shown by similar simulations for amorphous silicon. It explains the recently reported smoothing of multilayers and amorphous transition metal oxide films and underlines the general importance of impact-induced downhill currents for ion deposition, polishing, and nanopattering.