Surface modification of 316L stainless steel by diamond-like carbon films
Surface modification of 316L stainless steel by diamond-like carbon films
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类金刚石碳对316L不锈钢进行表面改性
DOI：
10.1007/s42243-020-00409-w
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发表时间：
2020-05-02
影响因子：
2.5
通讯作者：
Wu, Fa-yu
中科院分区：
文献类型：
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作者：
Li, Rui-wu;Zhang, Zheng;Wu, Fa-yu
采用脉冲等离子体增强化学气相沉积技术在316L不锈钢衬底上制备了类金刚石(DLC)薄膜，并通过调节脉冲电压优化了DLC薄膜的性能。用原子力显微镜、场发射扫描电子显微镜、拉曼光谱、纳米压痕和电化学工作站对316L不锈钢表面类金刚石膜的结构和性能进行了表征。结果表明，表面光滑致密的DLC膜具有较低的摩擦系数和较高的纳米压痕硬度，使316L不锈钢表面硬度提高了3倍以上。提高脉冲电压可以进一步优化类金刚石膜的力学性能及其与316L不锈钢的结合。在316L不锈钢表面镀膜后，自腐蚀电位提高了0.173 V，自腐蚀电流降低了99%，显著提高了316L不锈钢的耐蚀性能。
The diamond-like carbon (DLC) film on 316L stainless steel substrate was prepared by pulsed plasma-enhanced chemical vapor deposition, and the performance of the films was optimized by regulating the pulse voltage. Microstructure and properties of DLC film on 316L stainless steel were characterized by atomic force microscopy, field-emission scanning electron microscopy, Raman spectra, nano-indenter and electrochemical workstations. The results showed that DLC films with smooth and dense morphology have a low friction coefficient and high nano-indentation hardness, and the surface hardness of 316L stainless steel substrate was enhanced by more than 3 times. The mechanical properties of DLC films and their bond with 316L stainless steel could be further optimized by increasing pulse voltage. DLC films on 316L stainless steel substrate increased the self-corrosion potential by 0.173 V and decreased self-corrosion current by 99%, which significantly improved the anti-corrosive properties of 316L substrate.