New AC-based capacitance tomography system

New AC-based capacitance tomography system
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DOI:
10.1049/ip-smt:19990008
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发表时间:
1999
期刊:
--
影响因子:
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通讯作者:
Wuqiang Yang;T. York
Wuqiang Yang;T. York
中科院分区:
其他
文献类型:
--
作者:
Wuqiang Yang;T. York

文献摘要

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电容层析成像(ECT)是一种用于可视化包含介电元件的工业过程内部行为的新技术。断层扫描电容测量的一个特别困难是,与要测量的电极间电容(通常<0.5 pF)相比,ECT传感器对地的杂散电容很大(/spl sim/150 pF),测量范围很宽(0.01-2 pF)。作者提出了一种高灵敏度的交流电容测量电路,该电路是专门为此目的而设计的,并提出了一种基于pc的ECT系统。实验结果表明,该ECT系统可以测量小至0.01 pF的电容,误差为0.0002 pF,并能以每秒100帧以上的速度采集层析图像数据。
Electrical capacitance tomography (ECT) is a new technology that is used to visualise the internal behaviour of industrial processes comprising dielectric components. A particular difficulty with capacitance measurement for tomography is that the stray capacitance to earth of an ECT sensor is large (/spl sim/150 pF) compared with the interelectrode capacitance to be measured (usually <0.5 pF), and the measurement range is wide (0.01-2 pF). The authors present a highly sensitive AC-based capacitance measuring circuit, which has been specially designed for this purpose, and a PC-based ECT system with this circuit. Experimental results show that this ECT system can measure as small as 0.01 pF capacitance with 0.0002 pF error, and could collect tomographic image data at more than 100 frames per second.