Evaluation of the Factors that Influence the Fabrication of Porous Thin Films by Deposition of Aerosol Nanoparticles
Evaluation of the Factors that Influence the Fabrication of Porous Thin Films by Deposition of Aerosol Nanoparticles
复制标题
影响气溶胶纳米颗粒沉积制备多孔薄膜的因素评价
DOI：
10.1016/j.cej.2013.07.097
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
Y. Mantani and M. Shimada
中科院分区：
文献类型：
--
作者：
M. Kubo;Y. Ishihara;Y. Mantani and M. Shimada
在本研究中，通过气相沉积在等离子场中产生的非团聚金属氧化物纳米颗粒制备多孔膜。研究了沉积机理、纳米颗粒分散性和纳米颗粒直径等因素对多孔结构的影响。仔细调整生成条件，生成了直径在8至36 nm之间的非团聚tio2和sio2纳米颗粒。将带负电荷的非凝聚纳米颗粒静电沉积在施加直流正偏置电压的衬底上，可以快速制备多孔膜和高度均匀的孔结构，这可以通过估计颗粒沉积速率从理论上解释。与未聚集的纳米颗粒相比，聚集纳米颗粒的沉积导致薄膜具有更大的孔隙率和更随机的结构。孔隙度和随机性的增加是由于聚集的纳米颗粒被大面积拦截，导致沉积的聚集物形成空间位阻。随着纳米颗粒直径的增加，膜的孔径增大，而纳米颗粒的组成对膜的形貌没有影响。因此，本研究为利用各种纳米颗粒制备具有良好控制结构的多孔薄膜提供了有用的信息。
In this study, porous films were fabricated by gas-phase deposition of nonagglomerated metal oxide nanoparticles generated in a plasma field. The effects of several factors including the deposition mechanism, nanoparticle dispersibility, and nanoparticle diameter on the porous morphology were investigated systematically. Careful tuning of the generation conditions led to the generation of nonagglomerated TiO2and SiO2nanoparticles, with diameters ranging from 8 to 36 nm. The electrostatic deposition of the nonagglomerated, negatively charged nanoparticles onto a substrate to which a DC positive bias voltage was applied enabled fast fabrication of porous films as well as highly uniform pore structures, which was theoretically explained by estimating the rate of particle deposition. The deposition of agglomerated nanoparticles resulted in films with greater porosity and more random structures compared with those resulting from nonagglomerated nanoparticles. These increases in porosity and randomness were caused by a large area for the interception of agglomerated nanoparticles that led to a steric hindrance for the agglomerates being deposited. The pore sizes of the films increased as the diameters of the nanoparticles increased, whereas the composition of the nanoparticles did not affect the film morphology. Therefore, this study provides useful information for the fabrication of porous thin films with well-controlled structures from various nanoparticles.