First Direct Measurement of Sub-Nanosecond Polarization Switching in Ferroelectric Hafnium Zirconium Oxide
First Direct Measurement of Sub-Nanosecond Polarization Switching in Ferroelectric Hafnium Zirconium Oxide
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首次直接测量铁电氧化铪锆中的亚纳秒偏振切换
DOI：
10.1109/iedm19573.2019.8993509
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
Peide D. Ye
中科院分区：
文献类型：
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作者：
X. Lyu;M. Si;P. Shrestha;Kin P. Cheung;Peide D. Ye
在这项工作中，我们报告了一个超快的直接测量的瞬态铁电极化开关在铪锆氧化物与交叉金属-绝缘体-金属（MIM）结构。一个创纪录的低的亚纳秒特性开关时间为925 ps的实现，支持的成核限制开关模型。系统地研究了电场、薄膜厚度和器件面积对极化开关速度的影响。
In this work, we report on an ultrafast direct measurement on the transient ferroelectric polarization switching in hafnium zirconium oxide with a crossbar metal-insulator-metal (MIM) structure. A record low sub-nanosecond characteristic switching time of 925 ps was achieved, supported by the nucleation limited switching model. The impact of electric field, film thickness and device area on the polarization switching speed is systematically studied.