Mechanisms of impurity diffusion on Si with a point defect : Tight-binding molecular dynamics simulation
Mechanisms of impurity diffusion on Si with a point defect : Tight-binding molecular dynamics simulation
复制标题
点缺陷硅上的杂质扩散机制:紧束缚分子动力学模拟
DOI:
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发表时间:
2004
期刊:
影响因子:
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通讯作者:
S.Ogata
中科院分区:
文献类型:
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作者:
T.Igarashi;H.Iyetomi;K.Tsuruta;S.Ogata