Equivalence of the hard-wall and kinetic-fluid models of collisionless electron heating in capacitively coupled discharges
Equivalence of the hard-wall and kinetic-fluid models of collisionless electron heating in capacitively coupled discharges
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电容耦合放电中无碰撞电子加热的硬壁模型和运动流体模型的等效性
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
J. Booth
中科院分区：
文献类型：
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作者：
T. Lafleur;P. Chabert;M. Turner;J. Booth
通过从第一原理重新评估硬壁无碰撞电子加热模型，我们表明，尽管以前的批评（Gozadinos等2001物理评论快报。87135004），该模型通常可以与护套边缘处的射频（RF）电流连续性的要求一致，同时仍然产生净加热效应。此外，我们证明了硬壁和动力学流体加热模型源于相同的基本物理机制，并且在许多方面是相同的理论;它们仅在假定发生电子加热的空间区域以及确定有效电子分布函数的方式上有所不同。从根本上说，这两个模型预测，碰撞加热发生，因为非等温压缩和膨胀的等离子体电子振荡射频鞘。
By re-evaluating the hard-wall collisionless electron heating model from first principles, we show that despite previous criticisms (Gozadinos et al 2001 Phys. Rev. Lett. 87 135004), this model can in general be made consistent with the requirement of radio frequency (rf) current continuity at the sheath edge, while still producing a net heating effect. In addition, we demonstrate that the hard-wall and kinetic-fluid heating models stem from the same basic physical mechanism, and are in many ways the same theory; they differ only in the spatial region where electron heating is assumed to occur, and the way in which the effective electron distribution function is determined. Fundamentally, both models predict that collisionless heating occurs because of a non-isothermal compression and expansion of the plasma electrons by an oscillating rf sheath.