A micro rate gyroscope based on the SAW gyroscopic effect

A micro rate gyroscope based on the SAW gyroscopic effect
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DOI:
10.1088/0960-1317/17/11/014
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发表时间:
2007-11-01
影响因子:
2.3
通讯作者:
Yang, Sang Sik
Yang, Sang Sik
中科院分区:
工程技术4区
文献类型:
--
作者:
Lee, Sang Woo;Rhim, Jae Wook;Yang, Sang Sik

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我们提出了一种基于表面声波(SAW)陀螺效应的微速率陀螺仪(MRG),用于极高冲击的军事应用。我们不仅通过引入波速比和摄动方法从理论上推导了ST切割石英中的SAW陀螺增益因子,而且通过实验验证了该增益因子。所提出的 SAWMRG 由两个延迟线振荡器组成,作为差分方案运行。为了估计固有的插入损耗,我们在延迟线的设计过程中采用了等效电路模型。 9 x 9 mm(2) SAWMRG 在 ST 切割石英上制造,并装入专门设计的低温共烧陶瓷 (LTCC) 封装中,以确保良好的射频特性。延迟线的中心频率和插入损耗分别在 98.6 MHz 和 15.2 dB 处测得。我们使用速率表和随机噪声分析评估了 SAWMRG 的性能,结果表明,在高达 2000 deg s(-1) 的角速率下,灵敏度分别为 0.431 Hz deg(-1) s(-1),白噪声为 0.55 deg s(-1) Hz(-1/2)。因此,通过一系列性能评估验证了所提出的 SAWMRG 的可行性,证实了理论预测。
We propose a micro rate gyroscope (MRG)based on the surface acoustic wave (SAW) gyroscopic effect for extremely high-shock military applications. We not only derived theoretically the SAW gyroscopic gain factor in a ST-cut quartz by introducing a wave velocity ratio and the perturbation method, but also verified this gain factor by experiment. The proposed SAWMRG, which consists of two delay-line oscillators, operates as a differential scheme. To estimate an inherent insertion loss, we adopted the equivalent circuit model in the design process of the delay line. The 9 x 9 mm(2) SAWMRG was fabricated on a ST-cut quartz and loaded into a specially designed low temperature co-fired ceramic (LTCC) package to ensure good RF characteristics. The center frequency and the insertion loss of the delay line are measured at 98.6 MHz and 15.2 dB, respectively. We evaluated the performance of the SAWMRG, using a rate table and stochastic noise analysis, revealing a sensitivity of 0.431 Hz deg(-1) s(-1) in the angular rates up to 2000 deg s(-1) and a white noise of 0.55 deg s(-1) Hz(-1/2), respectively. Consequently the feasibility of the proposed SAWMRG was verified through a set of performance evaluations, confirming the theoretical predictions.