The effect of processing parameters on the properties of Ga-doped ZnO thin films by RF magnetron sputtering
The effect of processing parameters on the properties of Ga-doped ZnO thin films by RF magnetron sputtering
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DOI:
10.1016/j.cap.2009.11.060
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发表时间:
2010-03
影响因子:
2.4
通讯作者:
S. Shin;Kyu-Ung Sim;J. Moon;J. H. Kim
中科院分区:
文献类型:
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作者:
S. Shin;Kyu-Ung Sim;J. Moon;J. H. Kim