Effect of periods on wear performance of TiN/AlN superlattice films
Effect of periods on wear performance of TiN/AlN superlattice films
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周期对TiN/AlN超晶格薄膜磨损性能的影响
DOI：
10.1016/j.msea.2004.10.017
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发表时间：
2005
期刊：
影响因子：
6.4
通讯作者：
T. Liu
中科院分区：
文献类型：
--
作者：
S. Yao;W. Kao;Yean;T. Liu
在这项研究中，TiN/AlN超晶格薄膜的制备使用新开发的高速率反应溅射装置，其特点是一个非平衡和平衡磁控溅射系统。前者用于存款沉积A1 N膜，后者用于沉积TiN膜。本研究旨在通过控制沉积条件，获得一组具有不同周期的TiN/AlN超晶格薄膜，并研究周期对其基本性能和磨损行为的影响。结果表明，TiN/AlN超晶格薄膜的周期为2.4 ~ 67.6nm。与传统的单层TiN膜相比，周期约为3.6nm的TiN膜具有极高的硬度、优异的结合力和耐磨性。
In this study, the TiN/AlN superlattice films were prepared using a newly developed high-rate reactive sputtering set-up, which featured an unbalanced and a balanced magnetron sputtering system. The former was employed to deposit the A1N film, and the latter the TiN film. The aim of this study was to obtain, through controlling the deposition conditions, a group of TiN/AlN superlattice films with various periods, and then to investigate the influence of periods on their fundamental properties and wear behavior. The results revealed that the TiN/AlN superlattice films with periods ranging from 2.4 to 67.6nm were obtained. At periods ≦ 3.6nm, the films had extremely high hardness, excellent adhesion and wear performance, as compared with the traditional single-layer TiN film.