Closed-Loop Nanopatterning of Liquids with Dip-Pen Nanolithography
Closed-Loop Nanopatterning of Liquids with Dip-Pen Nanolithography
复制标题
使用浸笔纳米光刻技术对液体进行闭环纳米图案化
DOI：
10.1021/acsami.1c00095
复制
发表时间：
2021
影响因子：
9.5
通讯作者：
Brown, Keith A.
中科院分区：
文献类型：
--
作者：
Saygin, Verda;Xu, Bowen;Andersson, Sean B.;Brown, Keith A.
可靠地操作少量液体的能力是高通量化学的支柱，但对小型化的持续推动需要在如何处理纳米级液体样品方面进行创造性。在这里，我们描述了一个闭环的方法，图案化液体样品的pL到分fL尺度使用扫描探针光刻。具体来说，我们采用无尖端扫描探针和识别液体属性，使探针样品运输，很容易调整使用探头撤回速度。随后，我们介绍了一种新的双谐波惯性传感方案，用于跟踪探头上的液体质量。最后，这与基于流体力学的迭代控制方案相结合，该方案选择满足目标特征质量的打印条件，以实现闭环图案化，其质量精度优于1%，精度为1.4%。总之，这些进展解决了扫描探针光刻中的普遍问题，即，对图案化的实时闭环控制，以及液体的位置扫描探针光刻作为用于先进的高通量化学的液体的稳健纳米级操纵的候选者。
The ability to reliably manipulate small quantities of liquids is the backbone of high-throughput chemistry, but the continual drive for miniaturization necessitates creativity in how nanoscale samples of liquids are handled. Here, we describe a closed-loop method for patterning liquid samples on pL to sub-fL scales using scanning probe lithography. Specifically, we employ tipless scanning probes and identify liquid properties that enable probe–sample transport that is readily tuned using probe withdrawal speed. Subsequently, we introduce a novel two-harmonic inertial sensing scheme for tracking the mass of liquid on the probe. Finally, this is combined with a fluid mechanics-based iterative control scheme that selects printing conditions to meet a target feature mass to enable closed-loop patterning with better than 1% accuracy and ∼4% precision in terms of mass. Taken together, these advances address a pervasive issue in scanning probe lithography, namely, real-time closed-loop control over patterning, and position scanning probe lithography of liquids as a candidate for the robust nanoscale manipulation of liquids for advanced high-throughput chemistry.