Rapid and convenient method for preparing masters for microcontact printing with 1–12 μm features

Rapid and convenient method for preparing masters for microcontact printing with 1–12 μm features
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DOI:
10.1063/1.1781385
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发表时间:
2004-09
影响因子:
1.6
通讯作者:
Lloyd W. Zilch;G. Husseini;Yit-Yian Lua;Michael V. Lee;Kevin R. Gertsch;Bennion R. Cannon;R. Perry;Eric T. Sevy;M. Asplund;A. Woolley;M. Linford
Lloyd W. Zilch;G. Husseini;Yit-Yian Lua;Michael V. Lee;Kevin R. Gertsch;Bennion R. Cannon;R. Perry;Eric T. Sevy;M. Asplund;A. Woolley;M. Linford
中科院分区:
工程技术4区
文献类型:
--
作者:
Lloyd W. Zilch;G. Husseini;Yit-Yian Lua;Michael V. Lee;Kevin R. Gertsch;Bennion R. Cannon;R. Perry;Eric T. Sevy;M. Asplund;A. Woolley;M. Linford

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可以采用机械划线来创建具有凹陷特征的表面。通过复制模制,创建这些划线表面的弹性体副本,用作微接触印刷的印模。结果表明,这种创建微接触印刷母版的新方法可以使用计算机控制的铣床(CNC)来执行,使得这种方法特别简单,并且适合不需要在无颗粒环境中工作的大型技术社区使用。因此,不需要洁净室或其他专门设备,而这些设备通常是准备母版所需要的。飞行时间二次离子质谱法通过该方法证实了表面图案。最后,结果表明,划线母版中的特征尺寸可以通过划线期间改变尖端上的力来控制。
Mechanical scribing can be employed to create surfaces with recessed features. Through replica molding elastomeric copies of these scribed surfaces are created that function as stamps for microcontact printing. It is shown that this new method for creating masters for microcontact printing can be performed with a computer-controlled milling machine (CNC), making this method particularly straightforward and accessible to a large technical community that does not need to work in a particle free environment. Thus, no clean room, or other specialized equipment is required, as is commonly needed to prepare masters. Time-of-flight secondary ion mass spectrometry confirms surface pattering by this method. Finally, it is shown that feature size in the scribed master can be controlled by varying the force on the tip during scribing.