Basic Research of Vibration Energy Harvesting Micro Device using Vinylidene Fluoride / Trifluoroethylene Copolymer Thin Film
Basic Research of Vibration Energy Harvesting Micro Device using Vinylidene Fluoride / Trifluoroethylene Copolymer Thin Film
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偏二氟乙烯/三氟乙烯共聚物薄膜振动能量采集微型器件的基础研究
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
S. Shoji
中科院分区：
文献类型：
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作者：
T. Takiguchi;T. Sasaki;T. Nakajima;S. Yamaura;T. Sekiguchi;S. Shoji
研究了基于偏氟乙烯/三氟乙烯(VDF/TrFE)共聚物薄膜的MEMS振动能量采集微器件的基础研究。采用旋涂法制备了VDF/TrFE共聚物薄膜。制备的VDF/TrFE共聚物薄膜厚度为375~2793 nm。用LCR仪测量了VDF/TrFE共聚物薄膜的阻抗。根据C-V特性结果，对不同厚度的薄膜进行了全极化处理。用示波器观察外加振动下器件产生的功率。当薄膜厚度为2793 nm时，产生功率约为0.815μJ。
Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2793 nm. Impedance of VDF/TrFE copolymer thin film was measured by LCR meter. Thin film in each thickness was fully poled by voltage based on C-V characteristics result. Generated power of the devices under applied vibration was observed by an oscilloscope. When the film thickness is 2793 nm, the generated power was about 0.815 μJ.