Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-/Nanomanufacturing
Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-/Nanomanufacturing
复制标题
DOI：
10.1109/tmech.2010.2052107
复制
发表时间：
2011-08-01
影响因子：
6.4
通讯作者：
Dong, Jingyan
中科院分区：
文献类型：
--
作者：
Polit, Sebastian;Dong, Jingyan
本文介绍了一种高带宽压电式并联运动纳米定位XY工作台的设计、分析、制造和测试。整体式舞台设计有两个轴线，每个轴线由一个双固支梁和一个带有柔性梁和圆形柔性铰链的平行四边形混合柔性件组成。由压电致动器驱动的双固支梁作为线性棱柱轴。采用平行四边形混合柔性来实现驱动效应与另一轴的解耦。该机构设计分离了X和Y方向上的运动，并限制了XY平面上的寄生旋转，同时允许工作区域内的线性运动学增加带宽。运动学和动力学分析表明，工作台的机械结构在实现XY方向运动解耦的同时，获得了较高的带宽和良好的线性度。工作台由压电叠层驱动器驱动，并在系统中增加了两个电容规，构建了闭环系统。频率测试结果表明，两种振型的共振频率均在8 kHz以上。工作台能够沿每个轴以约1 nm的分辨率运动约15微米。由于并联运动机构的设计，整个工作空间实现了统一的性能。实现了一个PI控制器，获得了2 kHz的闭环带宽。
This paper presents the design analysis fabrication and testing of a high-bandwidth piezo-driven parallel kinematic nanopositioning XY stage. The monolithic stage design has two axes and each axis is composed of a doubly clamped beam and a parallelogram hybrid flexure with compliant beams and circular flexure hinges. The doubly clamped beam that is actuated by a piezoelectric actuator acts as a linear prismatic axis. The parallelogram hybrid flexures are used to decouple the actuation effect from the other axis. The mechanism design decouples the motion in the X-and Y-directions and restricts parasitic rotations in the XY plane while allowing for an increased bandwidth with linear kinematics in the operating region. Kinematic and dynamic analysis shows that the mechanical structure of the stage has decoupled motion in XY-direction while achieving high bandwidth and good linearity. The stage is actuated by piezoelectric stack actuators, and two capacitive gauges were added to the system to build a closed-loop positioning system. The results from frequency tests show that the resonant frequencies of the two vibrational modes are over 8 kHz. The stage is capable of about 15 mu m of motion along each axis with a resolution of about 1 nm. Due to parallel kinematic mechanism design, a uniform performance is achieved across the workspace. A PI controller is implemented for the stage and a closed-loop bandwidth of 2 kHz is obtained.