Effects of metal Ni with catalytic activity on magnetron sputtered Cr–Si resistive film in a heat and humid environment
Effects of metal Ni with catalytic activity on magnetron sputtered Cr–Si resistive film in a heat and humid environment
复制标题
DOI：
10.1016/j.surfcoat.2010.10.018
复制
发表时间：
2010-12
影响因子：
5.4
通讯作者：
Xuexin Wang;Zhi-qiang Zhang;J. Shao;Tian Bai
中科院分区：
文献类型：
--
作者：
Xuexin Wang;Zhi-qiang Zhang;J. Shao;Tian Bai
金属镍及其合金在电气应用中经常用作电阻膜和析氢反应的催化剂。本文采用磁控溅射法制备了高电阻Cr-Si和Cr-Si - ni薄膜电阻器（2.2MΩ和240kΩ），并通过设计的湿热实验研究了它们的性能。实验表明，Cr-Si - ni薄膜电阻器比Cr-Si薄膜电阻器具有更好的耐热性和耐湿性。其原因可能是由于金属Ni在Cr-Si-Ni薄膜中对析氢反应具有电催化活性。
Metal Ni and their alloys are often used as resistive films in electrical application and as catalysts in hydrogen evolution reactions. In this work, high-resistance Cr–Si and Cr–Si–Ni thin film resistors (2.2MΩ and 240kΩ) were prepared by the magnetron sputtering method and their properties were studied by the designed heat and humid experiment. Experiments showed that Cr–Si–Ni film resistors exhibited a better resistance to heat and humidity than Cr–Si film resistors. The reason may be attributed to the electrocatalytic activity of metal Ni in the Cr–Si–Ni film for hydrogen evolution reaction.