Epitaxial growth and surface acoustic wave properties of lithium niobate films grown by pulsed laser deposition
Epitaxial growth and surface acoustic wave properties of lithium niobate films grown by pulsed laser deposition
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脉冲激光沉积铌酸锂薄膜的外延生长和表面声波特性
DOI：
10.1063/1.358900
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发表时间：
1995
影响因子：
3.2
通讯作者：
S. Kawai
中科院分区：
文献类型：
--
作者：
Y. Shibata;K. Kaya;Kageyasu Akashi;M. Kanai;T. Kawai;S. Kawai
研究了用脉冲准分子激光烧蚀法在蓝宝石（001）和（110）衬底上沉积铌酸锂（LiNbO 3）薄膜。几个实验参数的影响。研究了靶材的Li/Nb比、衬底温度、沉积过程中气体的压力和组成对薄膜质量的影响。在优化的条件下，高质量的铌酸锂外延薄膜的沉积。生长的LiNbO 3薄膜具有足够的压电性，可以在没有极化的情况下制造表面声波（SAW）器件。在薄膜上观察到瑞利波和洛夫波，这些波显示出高的传播速度（5300至6600 m/s）和良好的温度系数（−34至−80 ppm/deg）。薄膜的化学成分，微观结构，晶体取向，结晶度和SAW性能进行了评价。
The deposition of lithium niobate (LiNbO3) films on sapphire substrates (001) and (110) using pulsed excimer‐laser ablation has been investigated. The effect of several experimental parameters. Li/Nb ratio of the target, the substrate temperature, and the pressure and composition of the gas during the deposition, on the resulting film quality are examined. Under optimized conditions, epitaxial LiNbO3 films of high quality are deposited. The as‐grown LiNbO3 films are sufficiently piezoelectric to fabricate surface acoustic wave (SAW) devices without poling. Rayleigh and Love‐type waves are observed on the films and these waves show high velocities of propagation (5300 to 6600 m/s) and good temperature coefficients (−34 to −80 ppm/deg). The chemical composition, microstructure, crystallographic orientation, crystallinity, and SAW properties of the films are evaluated.