Ring waveguides for gigahertz acoustic waves on silicon
Ring waveguides for gigahertz acoustic waves on silicon
复制标题
硅上千兆赫兹声波环形波导
DOI：
10.1063/1.4898814
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发表时间：
2014
影响因子：
4
通讯作者：
P. Santos
中科院分区：
文献类型：
--
作者：
P. Boucher;S. Rauwerdink;A. Tahraoui;C. Wenger;Y. Yamamoto;P. Santos
我们展示了一个环形谐振器的千兆赫表面声波（SAW）的锗波导硅芯片上组成。由波导一部分上的叉指换能器产生的SAW在弯曲路径上被引导并由第二叉指换能器检测。GHz波导模式映射使用高分辨率干涉法的结构相比，以及与弹性计算。讨论了这些基于半导体谐振器的声传播特性及其潜在的应用。
We demonstrate a ring resonator for gigahertz surface acoustic waves (SAWs) consisting of a Ge waveguide on a silicon chip. SAWs generated by interdigital transducers on a section of the waveguide are guided over a curved path and detected by a second interdigital transducers. The structure of the GHz waveguide modes mapped using high resolution interferometry compares well with elastic calculations. The acoustic propagation properties as well as the potential applications of these semiconductor-based resonators are discussed.
影响因子：
19.6
作者：
Granger, G.;Taubert, D.;Sachrajda, A. S.
通讯作者：
Sachrajda, A. S.