Tribological behavior of selected Mn + 1AXn phase thin films on silicon substrates
Tribological behavior of selected Mn + 1AXn phase thin films on silicon substrates
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DOI：
10.1016/j.surfcoat.2014.08.034
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发表时间：
2014-10
影响因子：
5.4
通讯作者：
M. Hopfeld;R. Grieseler;A. Vogel;H. Romanus;P. Schaaf
中科院分区：
文献类型：
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作者：
M. Hopfeld;R. Grieseler;A. Vogel;H. Romanus;P. Schaaf
近年来，Mn + 1AXn（MAX）相成为功能薄膜研究的热点。MAX相的潜在应用领域是高温结构材料、摩擦学保护涂层、腐蚀环境中的电接触以及传感器技术中的传感材料.本文重点研究了Ti 3SiC 2、Ti 2AlN和Cr2 AlC相薄膜与对应的轴承钢1.3505的摩擦学行为. MAX薄膜的沉积通过磁控溅射的元素多层膜和快速热退火合成。通过X射线衍射和透射电子显微镜研究MAX相的形成。对钢球的往复微观摩擦学滑动，扫描电子显微镜和能量色散X-射线光谱显示的摩擦系数在0.30至0.70和0.15至0.50的范围内，分别为Cr2 AlC和Ti 2AlN的粘着磨损机制。摩擦系数在0.15 ~ 0.25范围内的Ti 3SiC 2具有最佳的摩擦磨损性能。此外，对于所有MAX阶段，制定磨损机制的假设。
In the last years, Mn + 1AXn(MAX) phases came into the focus of functional thin film research. Potential fields of application for MAX phases are structural materials for high temperatures, tribological protective coatings, electrical contacts in aggressive environments, and as sensing materials in sensor technology.This paper focuses on the tribological behavior of Ti3SiC2, Ti2AlN and Cr2AlC phase thin films against a counterpart bearing steel 1.3505. The MAX films are deposited by magnetron sputtering of elemental multilayers and a rapid thermal annealing synthesis. The formation of the MAX phases is investigated by X-ray diffraction and transmission electron microscopy. The reciprocating micro-tribological sliding against steel balls, scanning electron microscopy and energy dispersive X-ray spectroscopy revealed an adhesive wear mechanism for Cr2AlC and Ti2AlN with friction coefficients in the range of 0.30 to 0.70 and 0.15 to 0.50, respectively. The best friction and wear behavior were observed for Ti3SiC2with a friction coefficient in the range of 0.15 to 0.25. Furthermore, for all MAX phases, hypotheses for the wear mechanisms are formulated.