Continuous composition spread using pulsed-laser deposition with a single segmented target
Continuous composition spread using pulsed-laser deposition with a single segmented target
复制标题
使用脉冲激光沉积和单个分段靶材进行连续成分扩散
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
M. Grundmann
中科院分区：
文献类型：
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作者：
H. Wenckstern;Zhipeng Zhang;F. Schmidt;J. Lenzner;H. Hochmuth;M. Grundmann
通过组合方法，新材料类别的探索和优化已经大大加速并变得非常高效。关于氧化物材料的薄膜沉积，脉冲激光沉积（PLD）已主要用于产生连续组成扩展（CCS）。到目前为止，两个或更多个目标被依次烧蚀，并且可移动掩模遮蔽衬底的不同部分以创建CCS。在这封信中，我们报告的实现建议的哈纳克（J。科学，1970，5，964），并提出了通过使用单个分段PLD靶容易实现CCS的各种类型。我们的模型的元素分布和厚度变化在两英寸的薄膜不同的实验参数。此外，我们已经沉积了一个具有MgxZn1−xO一维CCS的薄膜，并发现Mg浓度在2英寸衬底上线性变化。此外，我们表明MgxZn1−xO：Al，这种方法是适合实现二维CCS与线性变化的组成在两个垂直的组成梯度。进一步的几何形状的建议，说明这种CCS技术的潜力。
The exploration and optimization of new material classes have been considerably accelerated and made highly efficient by combinatorial methods. Concerning thin film deposition of oxide materials, pulsed-laser deposition (PLD) has been mostly applied for the creation of a continuous composition spread (CCS). Up to now, two or more targets were ablated sequentially and movable masks shadowed varying parts of the substrate to create the CCS. In this letter, we report on the realization of a suggestion of Hanak (J. Mater. Sci., 1970, 5, 964) made for sputter deposition and present various types of easy to realize CCS by using a single segmented PLD target. We model the elemental distribution and thickness variation within a two inch thin film for different experimental parameters. Further, we have deposited a thin film with one-dimensional CCS for MgxZn1−xO and found that the Mg concentration changes linearly across a 2 inch substrate. Further, we show for MgxZn1−xO:Al that this approach is suited for the realization of two-dimensional CCS with a linearly varying composition in two perpendicular composition gradients. Further geometries are suggested, illustrating the potential of this CCS technique.