Mobility Enhancement and Gate-Induced-Drain-Leakage Analysis of Strained-SiGe Channel p-MOSFETs with Higher-kappa LaLuO3 Gate Dielectric

Mobility Enhancement and Gate-Induced-Drain-Leakage Analysis of Strained-SiGe Channel p-MOSFETs with Higher-kappa LaLuO3 Gate Dielectric
复制标题

具有更高 kappa LaLuO3 栅极电介质的应变 SiGe 通道 p-MOSFET 的迁移率增强和栅极感应漏极泄漏分析

DOI:
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发表时间:
2014
影响因子:
3.5
通讯作者:
Zhao Qing-Tai
Zhao Qing-Tai
中科院分区:
物理与天体物理3区
文献类型:
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作者:
Liu Chang;Xue Zhong-Ying;Chen Ming;Zhao Qing-Tai

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