Scanning tunneling microscope equipped with a field ion microscope

Scanning tunneling microscope equipped with a field ion microscope
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配备场离子显微镜的扫描隧道显微镜

DOI:
10.1116/1.576070
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发表时间:
1989
期刊:
Journal of Vacuum Science and Technology
影响因子:
--
通讯作者:
S. Hyodo
S. Hyodo
中科院分区:
--
文献类型:
--
作者:
T. Sakurai;T. Hashizume;I. Kamiya;Y. Hasegawa;T. Ide;M. Miyao;I. Sumita;A. Sakai;S. Hyodo

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设计了一种具有多种表面分析功能的场离子(FIM)和扫描隧道显微镜(STM),称为FI-STM。通过观察石墨(0001)和硅(111)7×7表面的详细结构,该仪器已成功运行。FI-STM配备了低能电子衍射/俄歇电子能谱系统和溅射枪和/或加热装置,用于制备和表征样品表面。在室温下使用场离子显微镜原位观察STM扫描针尖的几何形状。
A combined field ion (FIM) and scanning tunneling microscope (STM), which is called ‘‘FI–STM,’’ was designed, constructed with multiple surface analytical functions. The instrument has been operated successfully by observing the detailed structures of the graphite (0001) and the Si(111)7×7 surfaces. The FI–STM is equipped with a low‐energy electron diffraction/Auger electron spectroscopy system and a sputtering gun and/or heating devices for preparing and characterizing specimen surfaces. The field ion microscope is operated at room temperature to observe the geometry of the STM scanning tip in situ in the course of STM investigations.