Reaction science of layer-by-layer thinning of graphene with oxygen neutrals at room temperature
Reaction science of layer-by-layer thinning of graphene with oxygen neutrals at room temperature
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DOI：
10.1016/j.carbon.2020.07.052
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发表时间：
2020-12
期刊：
影响因子：
10.9
通讯作者：
Hirotsugu Sugiura;H. Kondo;Kimitaka Higuchi;S. Arai;R. Hamaji;T. Tsutsumi;K. Ishikawa;M. Hori
中科院分区：
文献类型：
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作者：
Hirotsugu Sugiura;H. Kondo;Kimitaka Higuchi;S. Arai;R. Hamaji;T. Tsutsumi;K. Ishikawa;M. Hori
控制多层石墨烯中的层和面内缺陷是开发石墨烯非凡性能的关键。在高密度氧中性粒子下的逐层减薄是在室温反应科学中使用高压透射电子显微镜内的远程氧等离子体原位观察到的。尽管石墨烯的蚀刻速率在边缘处比在基面处高，但蚀刻从两个位置开始。每个蚀刻层由电子能量损失谱中的等离子体激元损失强度表示。暴露于远程氧等离子体后，多层石墨烯的电子衍射图案保持清晰的六重衍射图案。拉曼光谱揭示了多层石墨烯中缺陷的形成。原位透射电子显微镜证实了石墨烯刻蚀所需的氧中性的非热反应。
Controlling the layers and in-plane defects in multi-layer graphene is the key to exploiting the extraordinary properties of graphene. Layer-by-layer thinning under high-density oxygen neutrals was observedin situduring room-temperature reaction science using a remote oxygen plasma inside a high-voltage transmission electron microscopy. Even though the etching rate of graphene was higher at the edge than at the basal plane, etching started from both locations. Each etched layer was represented by the plasmon loss intensity in the electron energy loss spectrum. After exposure to the remote oxygen plasma, the electron diffraction pattern for the multi-layer graphene keep clear six-fold diffraction pattern. Raman spectroscopy revealed the formation of defects in multi-layer graphene. The nonthermal reaction of oxygen neutrals required for graphene etching was demonstrated byin situtransmission electron microscopy.