A Low-Power Pressure- and Temperature-Programmable Micro Gas Chromatography Column

A Low-Power Pressure- and Temperature-Programmable Micro Gas Chromatography Column
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DOI:
10.1109/jmems.2007.902470
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发表时间:
2007-10
影响因子:
2.7
通讯作者:
J. Potkay;G. Lambertus;Richard Sacks;Kensall D. Wise
J. Potkay;G. Lambertus;Richard Sacks;Kensall D. Wise
中科院分区:
工程技术3区
文献类型:
--
作者:
J. Potkay;G. Lambertus;Richard Sacks;Kensall D. Wise

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This paper presents the theory, fabrication, and experimental results for a high-performance low-power micro gas chromatography column. The suspended-dielectric 1-m-long column is split into two sections, permitting independent pressure and temperature programming. Integrated column heaters have a mean resistance of 16.8 kOmega and a temperature coefficient of resistance of 431 ppm/degC. The suspended column requires 11 mW to raise its temperature by 100degC in vacuum (1 mtorr). The column separates ten volatile organic compounds in 52 s and four chemical warfare agent simulants and an explosive simulant in 60 s.