Single-Walled Carbon Nanotube Thin-Film Sensor for Ultrasensitive Gas Detection
Single-Walled Carbon Nanotube Thin-Film Sensor for Ultrasensitive Gas Detection
复制标题
DOI：
10.1143/jjap.44.l482
复制
发表时间：
2005-04
影响因子：
1.5
通讯作者：
W. Wongwiriyapan;S. Honda;H. Konishi;T. Mizuta;T. Ikuno;T. Ito;T. Maekawa;Kengo Suzuki;H. Ishikawa;K. Oura;M. Katayama
中科院分区：
文献类型：
--
作者：
W. Wongwiriyapan;S. Honda;H. Konishi;T. Mizuta;T. Ikuno;T. Ito;T. Maekawa;Kengo Suzuki;H. Ishikawa;K. Oura;M. Katayama
我们展示了一种气体传感器制作的单壁碳纳米管（SWNT）薄膜直接生长在传统的传感器基板上。NO2和Cl2在室温操作下检测到ppb级，具有快速响应。采用电击穿技术，气体响应灵敏度提高了一个数量级。气体浓度和传感器响应之间的关系，推导出基于朗缪尔吸附等温线，预测的检测限为8 ppb的NO2。单壁碳纳米管薄膜气敏元件具有制作简单、应用方便等优点。
We demonstrated a gas sensor fabricated by growing a single-walled carbon nanotube (SWNT) thin film directly on a conventional sensor substrate. NO2 and Cl2 were detected down to the ppb level under room-temperature operation with a fast response. Using an electrical breakdown technique, gas response sensitivity was improved by an order of magnitude. The relationship between gas concentration and sensor response was derived based on the Langmuir adsorption isotherm, predicting a detection limit of 8 ppb for NO2. The SWNT thin-film gas sensor exhibits merits over other types of sensors by virtue of its simplicity in fabrication and feasible application.