Influences of an Aluminum Covering Layer on the Performance of Cross-Like Hall Devices.
Influences of an Aluminum Covering Layer on the Performance of Cross-Like Hall Devices.
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铝覆盖层对十字型霍尔器件性能的影响
DOI：
10.3390/s16010106
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发表时间：
2016-01-15
期刊：
影响因子：
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通讯作者：
Pan H
中科院分区：
文献类型：
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作者：
Lyu F;Liu X;Ding Y;Toh EH;Zhang Z;Pan Y;Wang Z;Li C;Li L;Sha J;Pan H
这项工作研究了铝覆盖物对跨样霍尔设备性能的影响。设计和制造了四种不同尺寸的霍尔传感器结构。霍尔传感器的敏感性和偏移是使用自行构建的测量系统来表征了两个影响其性能的关键点。这项工作分析了铝覆盖对性能这两个方面的影响。覆盖的铝层主要导致在不稳定的磁场中产生涡流效应，而在活性区域上方的额外耗竭区域。这两个点分别对灵敏度和偏移电压产生影响。分析指导设计人员是否选择使用铝层覆盖霍尔传感器的活动区域，以减少闪烁噪声并提高霍尔传感器的稳定性。因为Hall设备作为参考元素总是遭受较大的分散性，因此提高其稳定性是一个至关重要的问题。
This work studies the effects of an aluminum covering on the performance of cross-like Hall devices. Four different Hall sensor structures of various sizes were designed and fabricated. The sensitivity and offset of the Hall sensors, two key points impacting their performance, were characterized using a self-built measurement system. The work analyzes the influences of the aluminum covering on those two aspects of the performance. The aluminum layer covering mainly leads to an eddy-current effect in an unstable magnetic field and an additional depletion region above the active region. Those two points have influences on the sensitivity and the offset voltage, respectively. The analysis guides the designer whether to choose covering with an aluminum layer the active region of the Hall sensor as a method to reduce the flicker noise and to improve the stability of the Hall sensor. Because Hall devices, as a reference element, always suffer from a large dispersion, improving their stability is a crucial issue.