Electromechanical Piezoresistive Sensing in Suspended Graphene Membranes
Electromechanical Piezoresistive Sensing in Suspended Graphene Membranes
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DOI：
10.1021/nl401352k
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发表时间：
2013-07-01
期刊：
影响因子：
10.8
通讯作者：
Lemme, M. C.
中科院分区：
文献类型：
--
作者：
Smith, A. D.;Niklaus, F.;Lemme, M. C.
单层石墨烯表现出优异的电子和机械性能，使其成为纳米机电器件非常有前途的材料。在这里，我们最终证明了纳米机电膜结构中石墨烯的压阻效应，该结构提供了压力到应变转导的直接电读数。这使得它与一类重要的纳米机电系统 (NEMS) 传感器高度相关。该演示与我们的模拟以及之前报告的仪表系数和模拟值一致。我们实验中的膜充当独立于晶体取向的应变计，并允许激进的尺寸可扩展性。与传统压力传感器相比，该传感器每单位面积的灵敏度高出几个数量级。
Monolayer graphene exhibits exceptional electronic and mechanical properties, making it a very promising material for nanoelectromechanical devices. Here, we conclusively demonstrate the piezoresistive effect in graphene in a nanoelectromechanical membrane configuration that provides direct electrical readout of pressure to strain transduction. This makes it highly relevant for an important class of nanoelectromechanical system (NEMS) transducers. This demonstration is consistent with our simulations and previously reported gauge factors and simulation values. The membrane in our experiment acts as a strain gauge independent of crystallographic orientation and allows for aggressive size scalability. When compared with conventional pressure sensors, the sensors have orders of magnitude higher sensitivity per unit area.