Stable droplet generator for a high brightness laser produced plasma extreme ultraviolet source.
Stable droplet generator for a high brightness laser produced plasma extreme ultraviolet source.
复制标题
用于高亮度激光产生等离子体极紫外源的稳定液滴发生器。
DOI：
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发表时间：
2016
影响因子：
1.6
通讯作者：
S. Ellwi
中科院分区：
文献类型：
--
作者：
A. Vinokhodov;M. Krivokorytov;Y. Sidelnikov;V. Krivtsun;V. Medvedev;V. Bushuev;K. Koshelev;D. Glushkov;S. Ellwi
We present the results of the low-melting liquid metal droplets generation based on excited Rayleigh jet breakup. We discuss on the operation of the industrial and in-house designed and manufactured dispensing devices for the droplets generation. Droplet diameter can be varied in the range of 30-90 μm. The working frequency of the droplets, velocity, and the operating temperature were in the ranges of 20-150 kHz, 4-15 m/s, and up to 250 °C, respectively. The standard deviations for the droplet center of mass position both their diameter σ < 1 μm at the distance of 45 mm from the nozzle. Stable operation in the long-term (over 1.5 h) was demonstrated for a wide range of the droplet parameters: diameters, frequencies, and velocities. Physical factors affecting the stability of the generator operation have been identified. The technique for droplet synchronization, allowing using the droplet as a target for laser produced plasma, has been created; in particular, the generator has been successfully used in a high brightness extreme ultraviolet (EUV) light source. The operation with frequency up to 8 kHz was demonstrated as a result of the experimental simulation, which can provide an average brightness of the EUV source up to ∼1.2 kW/mm2 sr.
