Micro-structuring of glass with features less than 100 μm by electrochemical discharge machining
Micro-structuring of glass with features less than 100 μm by electrochemical discharge machining
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DOI：
10.1016/j.precisioneng.2009.01.001
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发表时间：
2009-10-01
影响因子：
3.6
通讯作者：
Chu, Chong Nam
中科院分区：
文献类型：
--
作者：
Cao, Xuan Doan;Kim, Bo Hyun;Chu, Chong Nam
为了提高玻璃三维微细结构的加工精度，对微细电解放电加工进行了研究。为了最小化结构并获得良好的表面微观结构，研究了电解质、脉冲开/关时间比、电压、进给率、转速和电解质浓度在钻削和铣削过程中的影响。在电火花加工中，施加电压以在工具电极上产生气膜和火花;然而，高电压产生差的加工分辨率。为了在低电压下在工具的整个表面上获得稳定的气体膜，使用了基于测压元件的新的机械接触检测器;尽可能减少工具电极在电解质中的浸入深度。在这项研究中，各种微结构小于100 μ m的尺寸，如圆划分60 μ m的微孔，10 μ m的薄壁，和一个3D微结构的制造，以证明潜在的微加工玻璃的电火花加工。(C)2009 Elsevier Inc. All rights reserved.
Micro-electrochemical discharge machining (ECDM) was studied in order to improve the machining of 3D micro-structures of glass. To minimize structures and obtain good surface microstructures, the effects of the electrolyte, the pulse on/off-time ratio, the voltage, the feedrate, the rotational speed, and the electrolyte concentration in the drilling and milling processes were studied. In ECDM, voltage is applied to generate a gas film and sparks on a tool electrode; however, high voltage produces poor machining resolution. To obtain a stable gas film over the whole surface of the tool at a low voltage, a new mechanical contact detector, based on a loadcell, was used; the immersion depth of the tool electrode in the electrolyte was reduced as much as possible. In this study, various micro-structures less than 100 mu m in size, such as circle divide 60 mu m micro-holes, a 10 mu m-thin wall, and a 3D micro-structure were fabricated to demonstrate the potential for micro-machining of glass by ECDM. (C) 2009 Elsevier Inc. All rights reserved.