Study of LDMOS-SCR: A high voltage ESD protection device

Study of LDMOS-SCR: A high voltage ESD protection device
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DOI:
10.1109/icsict.2010.5667324
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发表时间:
2010-12
期刊:
2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology
影响因子:
--
通讯作者:
Peng Zhang;Y. Wang;S. Jia;Xing Zhang
Peng Zhang;Y. Wang;S. Jia;Xing Zhang
中科院分区:
其他
文献类型:
--
作者:
Peng Zhang;Y. Wang;S. Jia;Xing Zhang

文献摘要

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提出了一种用于功率器件静电放电保护的新型LDMOS-SCR器件。该器件能够在SOI 40 V LDMOS工艺中实现,无需任何额外的掩模。由于采用了这种新的结构,使得触发电压合理可控,同时具有良好的散热性能。
A novel LDMOS-SCR device for electrostatic discharge protection of power device is presented. The device is able to be fabricated in SOI 40V LDMOS process without any extra mask. Due to the new structure, a proper and controllable triggering voltage and fine heat dissipation capability are achieved.