Efficient iterative algorithm for phase-shifting interferometry
Efficient iterative algorithm for phase-shifting interferometry
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DOI：
10.1016/j.optlaseng.2005.11.002
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发表时间：
2007-02
影响因子：
4.6
通讯作者：
Hongwei Guo;Zhang Zhao;Mingyi Chen
中科院分区：
文献类型：
--
作者：
Hongwei Guo;Zhang Zhao;Mingyi Chen
本文提出了一种用于相移干涉测量的有效迭代最小二乘算法。如果相移包含误差，则最小二乘算法的残差（即记录的强度与其重新计算的值之间的差）取决于这些误差。基于这一事实，一种方法，允许估计这些残差的相移误差。利用该结果，对相移值进行了校正。通过迭代相位估计和相移校正两个步骤，可以精确地重建相位分布。数值模拟和实验结果验证了该方法的有效性和性能。文中还讨论了该算法的收敛条件。
This paper presents an efficient iterative least-squares algorithm for phase-shifting interferometry. If the phase shifts contain errors, the residuals (i.e. the differences between the recorded intensities and their recalculated values) of least-squares algorithm are dependent on these errors. Based on this fact, an approach that allows estimating the phase shift errors from these residuals is derived. Using the results, the values of phase shifts are corrected. By iterating the two steps: phase evaluation and phase shift correction, the phase distribution can be accurately reconstructed. Its validity and performances have been investigated by both the numerical simulation and experiment results. The convergence condition with this algorithm is also discussed.