Soft-lithography-enabled fabrication of large numerical aperture refractive microlens array in hybrid SiO2–TiO2 sol-gel glass
Soft-lithography-enabled fabrication of large numerical aperture refractive microlens array in hybrid SiO2–TiO2 sol-gel glass
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DOI：
10.1063/1.1882751
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发表时间：
2005-03
影响因子：
4
通讯作者：
X. Yuan;W. Yu;M. He;J. Bu;W. Cheong;H. Niu;Xiang Peng
中科院分区：
文献类型：
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作者：
X. Yuan;W. Yu;M. He;J. Bu;W. Cheong;H. Niu;Xiang Peng
本文介绍了一种低成本的软光刻方法，用于在混合溶胶-凝胶玻璃中构建大数值孔径微透镜。制作过程包括三个步骤，即在光刻胶中制作大数值孔径微透镜阵列作为母版，在聚二甲基硅氧烷（PDMS）中复制母版作为弹性体模具，并将PDMS复制品复制到混合溶胶-凝胶玻璃上作为最终结构。与直接在光敏溶胶-凝胶玻璃中进行UV加工相比，所提出的方法在溶胶-凝胶玻璃中的微光学元件的形状和厚度的加工自由度方面提供了独特的优势。这消除了由于不断增加的需求而在任意形状和大厚度的溶胶-凝胶玻璃中直接光刻的困难。
This paper describes a low-cost soft-lithography method for building large-numerical-aperture microlenses in hybrid sol-gel glass. The fabrication processes comprise three steps, namely fabrication of large numerical aperture microlens array in photoresist as a master, replication of the master in poly-dimethylsiloxane (PDMS) as elastomeric molds and reproduction of the PDMS replica onto the hybrid sol-gel glass as an end structure. Comparing with the direct UV fabrication in the photosensitive sol-gel glass, the proposed method provides a unique advantage in terms of fabrication freedom in shape and thickness of micro-optical elements in the sol-gel glass. This eliminates the difficulties in direct photolithography in sol-gel glass for arbitrary shapes and great thickness due to ever increasing demands.