Null method for four-point probe measurement using high resistance probes
Null method for four-point probe measurement using high resistance probes
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DOI：
10.1380/ejssnt.2006.115
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发表时间：
2006
影响因子：
0.7
通讯作者：
M. Ishikawa;M. Yoshimura;K. Ueda
中科院分区：
文献类型：
--
作者：
M. Ishikawa;M. Yoshimura;K. Ueda
使用桥接电路的零值法被应用于使用高阻探头的所谓的四点探针法。将商用电阻(150kΩ-10MΩ)串联在一个由钨制成的电压测量探头上，以获得高电阻。成功地测量了厚约50 nm的图案化铂-钯薄膜的电阻率，测量范围可达亚微米量级。获得的阻值保持不变，与插入的电阻无关。[doi：10.1380/ejssnt.2006.115]
A null method, using a bridged circuit, is applied to the so-called four-point probe method using highly resistance probes. A commercial resistor (150 kΩ-10 MΩ) is serially connected with a voltage measurement probe (made of tungsten) in order to give high resistance. The resistivity of a patterned Pt-Pd film about 50 nm thick is successfully measured for the probe spacing down to the submicron scale. The obtained values of resistance remain unchanged irrespective of the inserted resistors. [DOI: 10.1380/ejssnt.2006.115]