Development of local evacuation system for inhibiting oxidization in atmospheric-pressure plasma jet nitriding
Development of local evacuation system for inhibiting oxidization in atmospheric-pressure plasma jet nitriding
复制标题
大气压等离子射流渗氮抑制氧化局部抽真空系统的研制
DOI：
10.1016/j.rinp.2019.02.067
复制
发表时间：
2019
影响因子：
5.3
通讯作者：
S. Kanazawa
中科院分区：
文献类型：
--
作者：
S. Chiba;R. Ichiki;T. Nakatani;T. Ueno;S. Kanazawa
为了抑制常压等离子体射流渗氮过程中的氧化，我们开发了一种局部排气系统。通过该系统，我们在处理气氛中进行局部真空吹扫，以减少残留的氧气。结果，在氮化过程中不期望地形成的氧化物层通过真空吹扫变得更薄。
To inhibit oxidization during nitriding process using the atmospheric-pressure plasma jet, we developed a local evacuation system. By this system, we perform vacuum purge in the treatment atmosphere locally to reduce residual oxygen. As a result, the oxide layer undesirably formed during nitriding process becomes thinner by vacuum purge.