Nano-Grating Fabrication Technique
Nano-Grating Fabrication Technique
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DOI：
10.4028/www.scientific.net/kem.326-328.131
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发表时间：
2006-12
期刊：
影响因子：
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通讯作者：
H. Xie;Zhanwei Liu;Ming Zhang;Pengwan Chen;F. Huang;Q. Zhang
中科院分区：
文献类型：
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作者：
H. Xie;Zhanwei Liu;Ming Zhang;Pengwan Chen;F. Huang;Q. Zhang
In this paper, a novel nano-moiré grating fabrication technique was proposed for nanometer deformation measurement. The grating fabrication process was performed with the aid of Atomic Force Microscope (AFM) on the basis of micro-fabrication technique. On the analysis of some correlative factors of influencing grating line quality, some important experimental parameters were optimized. In this study, some parallel and cross nano-gratings with frequencies of from 10000lines/mm to 20000lines/mm were fabricated. The successful experimental results demonstrate that the nano-grating fabrication technique is feasible and also indicated that these nano-gratings with nano-moiré method can be applied to deformation measurement, which offers a nanometer sensitivity and spatial resolution.
