Novel fused sensor for photo and ion sensing
Novel fused sensor for photo and ion sensing
复制标题
用于光和离子传感的新型融合传感器
DOI：
10.1016/j.snb.2004.07.029
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
M. Ishida
中科院分区：
文献类型：
--
作者：
K. Sawada;T. Ohshina;T. Hizawa;H. Takao;M. Ishida
提出了一种由融合光电传感器和离子传感器组成的新型传感器装置。我们描述了如何使用 CMOS 工艺成功制造原型器件。在所提出的装置中，光传感器和离子传感器融合在同一像素中，使得能够在同一传感区域中同时检测光信号和离子浓度密度。因此，通过使用这种新颖的传感器阵列可以阐明光分布和离子分布之间的关系。测量了光传感区域对输入光功率的依赖性。结果发现，输出信号与输入光功率成正比，并且不受溶液pH值的影响。还研究了输出信号对 pH 值的依赖性，发现它不受光强度的影响。
A novel sensor device, comprising of fused photo-sensors and ion-sensors, is proposed. We describe how a prototype device was successfully fabricated using a CMOS process. In the proposed device, a photo-sensor and an ion-sensor are fused in the same pixel, enabling the photo-signal and the ion concentration density to be detected simultaneously in the same sensing area. Therefore, the relationship between light distribution and ion distribution can be clarified by using this novel sensor array. The dependence of the photo-sensing region on the power of the input-light was measured. It was found that the output signal is proportional to the input-light power, and is not influenced by the pH value of the solution. The dependence of the output signal on the pH was also investigated, and it was found that it was not influenced by the light intensity.