A micromachined optical double well for thermo-optic switching via resonant tunneling effect
A micromachined optical double well for thermo-optic switching via resonant tunneling effect
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DOI：
10.1063/1.2951621
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发表时间：
2008-06
影响因子：
4
通讯作者：
W. Zhu;Xuming Zhang;A. Liu;H. Cai;T. Jonathan;T. Bourouina
中科院分区：
文献类型：
--
作者：
W. Zhu;Xuming Zhang;A. Liu;H. Cai;T. Jonathan;T. Bourouina
本文介绍了一种由微机械硅棱镜和气隙构成的高-低-高-低-高折射率结构的光学双阱结构的热光开关特性。分析表明，这种结构具有全透射（即导通状态），并且需要低折射率变化来实现开关功能。该器件采用深蚀刻工艺在隔离硅片上制作。在实验中，它的开关速度为1μs，消光比为30dB。与其他微机械开关相比，该器件利用了不同的物理原理，具有开关速度快、功耗低等优点。
This letter presents the thermo-optic switching characteristics of an optical double-well structure, which has a high-low-high-low-high refractive index construct formed by micromachined silicon prisms and air gaps. Analysis shows such structure features full transmission (i.e., on state) and requires low refractive index change for switching function. The device is fabricated on silicon-on-isolator wafer using deep etching process. In experiment, it measures a switching speed of 1μs and an extinction ratio of 30dB. Compared with the other micromachined switches, this device utilizes different physical principle and processes various merits such as fast switching speed and low power consumption.