Polycrystalline Diamond Micro-Hotplates.
Polycrystalline Diamond Micro-Hotplates.
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DOI：
10.1002/smll.202303976
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发表时间：
2023-08
期刊：
影响因子：
13.3
通讯作者：
E. Thomas;Jaspa Stritt;S. Mandal;M. Imboden;O. Williams
中科院分区：
文献类型：
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作者：
E. Thomas;Jaspa Stritt;S. Mandal;M. Imboden;O. Williams
微热板结构越来越多地被研究用于许多应用，从基于吸收的气体传感器内的宽带红外源到用于超高分辨率成像的原位加热器阶段。对于通常由放置在独立式散热器元件顶部的导电电极制成的设备，各层之间的热膨胀系数 (CTE) 不匹配以及加热元件内的电迁移通常会导致温度超过 1600 K 时出现故障。为了缓解此类问题，一系列不同几何形状的加热板由单层机械坚固、高导热性和低 CTE 硼掺杂多晶金刚石制成。在高真空条件下进行测试和发射光谱表征后，所得器件表现出类似灰体的发射响应，并在施加功率 ⩽100 mW 时达到远远超过传统几何形状的温度，高达 2731 K。同时热化时间的表征表明快速的毫秒响应时间，而拉曼光谱表明器件的性能由高温下的累积石墨化决定。因此，金刚石和 sp2 碳都被证明是用于制造下一代微热板的有前途的材料。
Micro-hotplate structures are increasingly being investigated for use in a host of applications ranging from broadband infra-red sources within absorption-based gas sensors to in situ heater stages for ultra-high-resolution imaging. With devices usually fabricated from a conductive electrode placed on top of a freestanding radiator element, coefficient of thermal expansion (CTE) mismatches between layers and electro-migration within the heating element typically lead to failure upon exceeding temperatures of 1600 K. In an attempt to mitigate such issues, a series of hotplates of varying geometry have been fabricated from a single layer of mechanically robust, high thermal conductivity, and low CTE boron-doped polycrystalline diamond. Upon testing under high vacuum conditions and characterization of the emission spectra, the resulting devices are shown to exhibit a grey-body like emission response and reach temperatures vastly in excess of conventional geometries of up to 2731 K at applied powers of ⩽100 mW. Characterization of the thermalization time meanwhile demonstrates rapid millisecond response times, while Raman spectroscopy reveals the performance of the devices is dictated by cumulative graphitization at elevated temperatures. As such, both diamond and sp2 carbon are shown to be promising materials for the fabrication of next-generation micro-hotplates.